000 00639nam a2200181Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9781510626478 (Print)
020 _a9781510626485 (Online)
040 _cIIA Library
100 _aHarding, Kevin G., ed.
_942984
245 0 _aDimensional Optical Metrology and Inspection for Practical Applications VIII
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2019
300 _aOnline resource
490 _aProceedings of SPIE; V. 10991
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10991
_yClick Here to Access eBook
942 _cEB
999 _c24760
_d24760