000 00634nam a2200181Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9781510609419 (Print)
020 _a9781510609426 (Online)
040 _cIIA Library
100 _aHarding, Kevin, ed.
_942982
245 0 _aDimensional Optical Metrology and Inspection for Practical Applications VI
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2017
300 _aOnline resource
490 _aProceedings of SPIE; V. 10220
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10220
_yClick Here to Access eBook
942 _cEB
999 _c24758
_d24758