000 00592nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9781510601093 (Print)
040 _cIIA Library
100 _aHarding, Kevin, ed.
_942981
245 0 _aDimensional Optical Metrology and Inspection for Practical Applications V
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2016
300 _aOnline resource
490 _aProceedings of SPIE; V. 9868
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9868
_yClick Here to Access eBook
942 _cEB
999 _c24757
_d24757