| 000 | 00567nam a2200169Ia 4500 | ||
|---|---|---|---|
| 003 | IN-BaIIA | ||
| 008 | 211028s9999 xx s 000 0 eng d | ||
| 020 | _a9780892521272 (Print) | ||
| 040 | _cIIA Library | ||
| 100 |
_aGiffin, James, ed. _942879 |
||
| 245 | 0 |
_aDevelopments in Semiconductor Microlithography II _h[eBook] |
|
| 260 |
_aWashington, USA _bSPIE _c1977 |
||
| 300 | _aOnline resource | ||
| 490 | _aProceedings of SPIE; V. 0100 | ||
| 856 |
_uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0100 _yClick Here to Access eBook |
||
| 942 | _cEB | ||
| 999 |
_c24631 _d24631 |
||