000 00599nam a2200181Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9781510637887 (Print)
020 _a9781510637894 (Online)
040 _cIIA Library
100 _aKhounsary, Ali, ed.
245 0 _aAdvances in X-Ray/EUV Optics and Components XV
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2020
300 _aOnline resource
490 _aProceedings of SPIE; V. 11491
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11491
_yClick Here to Access eBook
942 _cEB
999 _c23394
_d23394