000 00606nam a2200181Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9781510620919 (Print)
020 _a9781510620926 (Online)
040 _cIIA Library
100 _aGoto, Shunji, ed.
_941925
245 0 _aAdvances in X-Ray/EUV Optics and Components XIII
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2018
300 _aOnline resource
490 _aProceedings of SPIE; V. 10760
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10760
_yClick Here to Access eBook
942 _cEB
999 _c23392
_d23392