000 00610nam a2200181Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9781510612297 (Print)
020 _a9781510612303 (Online)
040 _cIIA Library
100 _aMorawe, Christian, ed.
_941924
245 0 _aAdvances in X-Ray/EUV Optics and Components XII
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2017
300 _aOnline resource
490 _aProceedings of SPIE; V. 10386
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10386
_yClick Here to Access eBook
942 _cEB
999 _c23391
_d23391