000 00562nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9781628417548 (Print)
040 _cIIA Library
100 _aGoto, Shunji, ed.
_941923
245 0 _aAdvances in X-Ray/EUV Optics and Components X
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2015
300 _aOnline resource
490 _aProceedings of SPIE; V. 9588
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9588
_yClick Here to Access eBook
942 _cEB
999 _c23389
_d23389