000 00595nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819488923 (Print)
040 _cIIA Library
100 _aSchoenfeld, Winston, ed.
_941634
245 0 _aAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics V
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2012
300 _aOnline resource
490 _aProceedings of SPIE; V. 8249
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8249
_yClick Here to Access eBook
942 _cEB
999 _c23029
_d23029