000 00610nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819468208 (Print)
040 _cIIA Library
100 _aDuparré, Angela, ed.
_941601
245 0 _aAdvanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2007
300 _aOnline resource
490 _aProceedings of SPIE; V. 6672
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6672
_yClick Here to Access eBook
942 _cEB
999 _c22996
_d22996