000 00623nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9781628418057 (Print)
040 _cIIA Library
100 _aZhou, Zhiping, ed.
_941287
245 0 _a2015 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2015
300 _aOnline resource
490 _aProceedings of SPIE; V. 9624
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9624
_yClick Here to Access eBook
942 _cEB
999 _c22663
_d22663