000 00621nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819499653 (Print)
040 _cIIA Library
100 _aZhou, Zhiping, ed.
_941281
245 0 _a2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication
_h[eBook]
260 _aWashington, USA
_bSPIE
_c18
300 _aOnline resource
490 _aProceedings of SPIE; V. 9047
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9047
_yClick Here to Access eBook
942 _cEB
999 _c22656
_d22656