000 00645nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819474025 (Print)
040 _cIIA Library
100 _aZhang, Xuping, ed.
_941261
245 0 _a2008 International Conference on Optical Instruments and Technology: Microelectronic and Optoelectronic Devices and Integration
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2009
300 _aOnline resource
490 _aProceedings of SPIE; V. 7158
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7158
_yClick Here to Access eBook
942 _cEB
999 _c22635
_d22635