000 00523nam a2200181Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819483249 (Print)
020 _a9780819483256 (Online)
040 _cIIA Library
100 _aLevinson, Harry J.
_940892
245 0 _aPrinciples of Lithography
_h[eBook]
250 _a3rd ed.
260 _aWashington, USA
_bSPIE
_c2010
300 _aOnline resource
856 _uhttps://doi.org/10.1117/3.865363
_yClick Here to Access eBook
942 _cEB
999 _c22428
_d22428