000 00513nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9781510622937 (Print)
020 _a9781510622944 (Online)
040 _cIIA Library
100 _aHarding, Kevin G.
_941075
245 0 _aPractical Optical Dimensional Metrology
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2019
300 _aOnline resource
856 _uhttps://doi.org/10.1117/3.2513685
_yClick Here to Access eBook
942 _cEB
999 _c22426
_d22426