| 000 | 00521nam a2200169Ia 4500 | ||
|---|---|---|---|
| 003 | IN-BaIIA | ||
| 008 | 211028s9999 xx s 000 0 eng d | ||
| 020 | _a9780819450210 (Print) | ||
| 020 | _a9781510607873 (Online) | ||
| 040 | _cIIA Library | ||
| 100 |
_aMotamedi, Manouchehr _941025 |
||
| 245 | 0 |
_aMOEMS: Micro-Opto-Electro-Mechanical Systems _h[eBook] |
|
| 260 |
_aWashington, USA _bSPIE _c2005 |
||
| 300 | _aOnline resource | ||
| 856 |
_uhttps://doi.org/10.1117/3.2265061 _yClick Here to Access eBook |
||
| 942 | _cEB | ||
| 999 |
_c22352 _d22352 |
||