000 00523nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819495983 (Print)
020 _a9781510607941 (Online)
040 _cIIA Library
100 _aRai-Choudhury, Prosenjit
_941019
245 0 _aMEMS and MOEMS Technology and Applications
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2000
300 _aOnline resource
856 _uhttps://doi.org/10.1117/3.2265068
_yClick Here to Access eBook
942 _cEB
999 _c22345
_d22345