| 000 | 00521nam a2200169Ia 4500 | ||
|---|---|---|---|
| 003 | IN-BaIIA | ||
| 008 | 211028s9999 xx s 000 0 eng d | ||
| 020 | _a9781628416626 (Online) | ||
| 020 | _a9781628418118 (Print) | ||
| 040 | _cIIA Library | ||
| 100 |
_aSu, Bo _940997 |
||
| 245 | 0 |
_aIntroduction to Metrology Applications in IC Manufacturing _h[eBook] |
|
| 260 |
_aWashington, USA _bSPIE _c2015 |
||
| 300 | _aOnline resource | ||
| 856 |
_uhttps://doi.org/10.1117/3.2197207 _yClick Here to Access eBook |
||
| 942 | _cEB | ||
| 999 |
_c22311 _d22311 |
||