000 00513nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819491404 (Print)
020 _a9780819491411 (Online)
040 _cIIA Library
100 _aLangenbeck, Peter
_940985
245 0 _aInterferometry for Precision Measurement
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2014
300 _aOnline resource
856 _uhttps://doi.org/10.1117/3.928443
_yClick Here to Access eBook
942 _cEB
999 _c22298
_d22298