| 000 | 00506nam a2200169Ia 4500 | ||
|---|---|---|---|
| 003 | IN-BaIIA | ||
| 008 | 211028s9999 xx s 000 0 eng d | ||
| 020 | _a9781510639393 (Print) | ||
| 020 | _a9781510639409 (Online) | ||
| 040 | _cIIA Library | ||
| 100 |
_aLevinson, Harry J. _940892 |
||
| 245 | 0 |
_aExtreme Ultraviolet Lithography _h[eBook] |
|
| 260 |
_aWashington, USA _bSPIE _c2020 |
||
| 300 | _aOnline resource | ||
| 856 |
_uhttps://doi.org/10.1117/3.2581446 _yClick Here to Access eBook |
||
| 942 | _cEB | ||
| 999 |
_c22188 _d22188 |
||