| 000 | 00484nam a2200169Ia 4500 | ||
|---|---|---|---|
| 003 | IN-BaIIA | ||
| 008 | 211028s9999 xx s 000 0 eng d | ||
| 020 | _a9780819469649 (Print) | ||
| 020 | _a9780819480705 (Online) | ||
| 040 | _cIIA Library | ||
| 100 |
_aBakshi, Vivek _940888 |
||
| 245 | 0 |
_aEUV Lithography _h[eBook] |
|
| 260 |
_aWashington, USA _bSPIE _c2008 |
||
| 300 | _aOnline resource | ||
| 856 |
_uhttps://doi.org/10.1117/3.769214 _yClick Here to Access eBook |
||
| 942 | _cEB | ||
| 999 |
_c22184 _d22184 |
||