000 00503nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819475626 (Print)
020 _a9780819483997 (Online)
040 _cIIA Library
100 _aOkoroanyanwu, Uzodinma
_940837
245 0 _aChemistry and Lithography
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2010
300 _aOnline resource
856 _uhttps://doi.org/10.1117/3.821384
_yClick Here to Access eBook
942 _cEB
999 _c22131
_d22131