| 000 | 01021nam a2200229Ia 4500 | ||
|---|---|---|---|
| 003 | IN-BaIIA | ||
| 008 | 211028s9999 xx 000 0 eng d | ||
| 020 | _a9780819465801 | ||
| 040 | _cIIA Library | ||
| 080 |
_a535.8(063) _bMEM |
||
| 111 |
_aSociety of Photo-Optical Instrumentation Engineers Conference _cUSA _d2007 Jan. 24 - 25 _930703 |
||
| 245 | 0 |
_aMEMS adaptive optics _bproceedings of SPIE conference held in San Jose, California, USA, 24 - 25 January 2007 _cedited by Scot S. Olivier,Thomas G. Bifano and Joel A. Kubby |
|
| 260 |
_aWashington _bThe International Society for Optical Engineering _c2007 |
||
| 300 | _a[various pagings.] | ||
| 490 | _aProceedings of SPIE; v. 6467 | ||
| 650 |
_aOptics, Adaptive-Congress, Microelectromechanical systems, Optical instruments-Design and constuction MEMs _930704 |
||
| 700 |
_aBifano, Thomas G. _930705 |
||
| 700 |
_aKubby, Joel A. _930706 |
||
| 700 |
_aOlivier, Scot S., ed. _930707 |
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| 710 | _aSociety of Photo-optical Instrumentation Engineers | ||
| 942 | _cBK | ||
| 999 |
_c16534 _d16534 |
||