| 000 | 00594nam a2200217Ia 4500 | ||
|---|---|---|---|
| 003 | IN-BaIIA | ||
| 008 | 211028s9999 xx 000 0 eng d | ||
| 020 | _a0-412-46590-6 | ||
| 040 | _cIIA Library | ||
| 080 |
_a533.5 _bDEL-6 |
||
| 100 |
_aDelchar, T. A _926180 |
||
| 245 | 0 |
_aVacuum physics and techniques _cT. A. Delchar |
|
| 260 |
_aLondon _bChapman and Hall _c1993 |
||
| 300 | _aix, 253p. | ||
| 490 | _aPhysics and its applications; v. 6 | ||
| 650 |
_aKinetic theory _92956 |
||
| 650 | _aTechniques | ||
| 650 |
_aVaccum systems _926181 |
||
| 650 |
_aVacuum pumps _93024 |
||
| 942 | _cBK | ||
| 999 |
_c14669 _d14669 |
||