| 000 | 00623nam a2200205Ia 4500 | ||
|---|---|---|---|
| 003 | IN-BaIIA | ||
| 008 | 211028s9999 xx 000 0 eng d | ||
| 020 | _a0-306-43578-0 | ||
| 040 | _cIIA Library | ||
| 080 |
_a621.38 _bVAL |
||
| 100 |
_aValiev, Kamil A _923538 |
||
| 245 | 4 |
_aThe physics of submicron lithography _cKamil A. Valiev |
|
| 260 |
_aNew York _bPlenum Press _c1992 |
||
| 300 | _axi, 493p. | ||
| 490 | _aMicrodevices: physics and fabrication technologies | ||
| 650 |
_aElectronics _91576 |
||
| 650 |
_aLithography _923539 |
||
| 650 |
_aPhysics _973 |
||
| 942 | _cBK | ||
| 999 |
_c13426 _d13426 |
||