000 00532nam a2200181Ia 4500
003 IN-BaIIA
008 211028s9999 xx 000 0 eng d
020 _a0-471-81242-0
040 _cIIA Library
080 _a533.5
_bO'HA
100 _aO'Hanlon, John F.
_921196
245 2 _aA user's guide to vacuum technology
_cJohn F. O'Hanlon
250 _a2nd ed.
260 _aNew York
_bJohn Wiley & Sons
_c1989
300 _axvii, 481p.
650 _aVacuum technology
_920480
942 _cBK
999 _c12152
_d12152