00733nam a2200205Ia 4500003000900000008004100009020001800050040001600068080001700084100002600101245015900127260003300286300001500319650002700334650001900361650002600380942000700406999001500413952009900428IN-BaIIA211028s9999 xx 000 0 eng d a0-306-67401-7 cIIA Library a539.184bBRI aBrice, David K911479 0aIon implantation range and energy deposition distributionbvol. 1, high incident ion energiescDavid K Brice  aNew YorkbPlenum Pressc1975 axii, 590p. aIon implanation911480 aNASA thesaurus aNuclear physics91527 cBK c6703d6703 00104070aBANbBANcGENd1981-01-13l0o539.184/ BRIp7453r2021-11-05w1981-01-13yBKG79.5