00556nam a2200169Ia 4500003000900000008004100009020001800050040001600068080001700084100001900101245015900120260003300279300001500312650002000327650001900347650002000366IN-BaIIA211028s9999 xx 000 0 eng d a0-306-67401-7 cIIA Library a539.184bBRI aBrice, David K 0aIon implantation range and energy deposition distributionbvol. 1, high incident ion energiescDavid K Brice  aNew YorkbPlenum Pressc1975 axii, 590p. aIon implanation aNASA thesaurus aNuclear physics