00731nai a2200181Ia 4500003000900000008004100009022002200050022002300072040001600095245005800111260008600169310001400255362002600269521006900295650004700364650005000411856008800461IN-BaIIA211028c9999    xx      s     000 0 eng d  a1057-7157 (Print)  a1941-0158 (Online)  cIIA Library 0aJournal of Microelectromechanical Systemsh[eJournal]  aNew York, USAbThe Institute of Electrical and Electronics Engineers, Inc. (IEEE)  aBimonthly  a1(1); 1992 - Present   bSubscribed through National Knowledge Resource Consortium (NKRC)  a Components, Circuits, Devices and Systems  aEngineered Materials, Dielectrics and Plasmas  uhttps://ieeexplore.ieee.org/servlet/opac?punumber=84yClick Here to Access eJournal