00816nai a2200193Ia 4500003000900000008004100009022002300050022002200073040001600095245006600111260002100177310001400198362002500212521003500237856012800272942000700400999001700407952019800424IN-BaIIA211028c9999    xx      s     000 0 eng d  a1932-5134 (Online)  a1932-5150 (Print)  cIIA Library 0aJournal of Micro/Nanolithography, MEMS, and MOEMSh[eJournal]  aWashingtonbSPIE  aQuarterly  a1(1); 2002 - Present  bSubscribed through IIA Library  uhttps://www.spiedigitallibrary.org/journals/journal-of-micro-nanolithography-mems-and-moems yClick Here to Access eJournal  cEJ  c35133d35133  00104070aBANbBANd2011-07-01eSPIEh1(1); 2002 - Presentl0pEJ1217r2021-11-05uhttps://www.spiedigitallibrary.org/journals/journal-of-micro-nanolithography-mems-and-moems w2021-11-05yEJ