TY  - DATA
TI  - Journal of Micro/Nanolithography, MEMS, and MOEMS
SN  - 1932-5134
CY  - Washington
PB  - SPIE
N1  - Subscribed through IIA Library
UR  - https://www.spiedigitallibrary.org/journals/journal-of-micro-nanolithography-mems-and-moems 
ER  -