Journal of Micro/Nanolithography, MEMS, and MOEMS  [eJournal] 

 - Washington  SPIE 
 - Quarterly 
 - 1(1); 2002 - Present 
<br/><br/> Subscribed through IIA Library 
<br/><br/><label>ISSN: </label>1932-5134 (Online) 1932-5150 (Print)