00738nai a2200181Ia 4500003000900000008004100009022002200050022002300072040001600095245006500111260008600176310001400262362002600276521006900302650005100371650004600422856008800468IN-BaIIA211028c9999    xx      s     000 0 eng d  a0894-6507 (Print)  a1558-2345 (Online)  cIIA Library 0aIEEE Transactions on Semiconductor Manufacturingh[eJournal]  aNew York, USAbThe Institute of Electrical and Electronics Engineers, Inc. (IEEE)  aQuarterly  a1(1); 1988 - Present   bSubscribed through National Knowledge Resource Consortium (NKRC)  a Engineered Materials, Dielectrics and Plasmas  aComponents, Circuits, Devices and Systems  uhttps://ieeexplore.ieee.org/servlet/opac?punumber=66yClick Here to Access eJournal