IEEE Transactions on Semiconductor Manufacturing  [eJournal] 

 - New York, USA  The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 
 - Quarterly 
 - 1(1); 1988 - Present  
<br/><br/> Subscribed through National Knowledge Resource Consortium (NKRC) 
<br/><br/><label>ISSN: </label>0894-6507 (Print) 1558-2345 (Online) 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Engineered Materials, Dielectrics and Plasmas<br/>Components, Circuits, Devices and Systems