00533nam a2200145Ia 4500003000900000008004100009020002600050040001600076100001000092245009700102260003200199300002000231490003300251856010300284IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819404046 (Print)  cIIA Library  a, ed. 0aX-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithographyh[eBook]  aWashington, USAbSPIEc1991  aOnline resource  aProceedings of SPIE; V. 1343  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1343yClick Here to Access eBook