00525nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245007700114260003200191300002000223490003300243856010300276IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892524839 (Print)  cIIA Library  aWilson, Alan, ed. 0aX-Ray Lithography and Applications of Soft X-Rays to Technologyh[eBook]  aWashington, USAbSPIEc1984  aOnline resource  aProceedings of SPIE; V. 0448  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0448yClick Here to Access eBook