@book{33872,
	author = {Wilson, Alan, ed.},
	title = {X-Ray Lithography and Applications of Soft X-Rays to Technology},
	publisher = {SPIE},
	year = {1984},
	series = {Proceedings of SPIE; V. 0448},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0448}
}