TY  - BOOK
AU  - Gordon, Colin, ed.
TI  - Vibration Control in Microelectronics, Optics, and Metrology
T2  - Proceedings of SPIE; V. 1619
SN  - 9780819407573 (Print)
PY  - 1992///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1619
ER  -