Gordon, Colin, ed. <br/><br/>
Vibration Control in Microelectronics, Optics, and Metrology  [eBook] 

 - Washington, USA  SPIE  1992 
 - Online resource 
 - Proceedings of SPIE; V. 1619 .
<br/><br/><label>ISBN: </label>9780819407573 (Print)