@book{33594,
	author = {Gordon, Colin, ed.},
	title = {Vibration Control in Microelectronics, Optics, and Metrology},
	publisher = {SPIE},
	year = {1992},
	series = {Proceedings of SPIE; V. 1619},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1619}
}