TY  - BOOK
AU  - Huang, Peisen, ed.
TI  - Two- and Three-Dimensional Methods for Inspection and Metrology VI
T2  - Proceedings of SPIE; V. 7066
SN  - 9780819472861 (Print)
PY  - 2008///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7066
ER  -