TY  - BOOK
AU  - Huang, Peisen, ed.
TI  - Two- and Three-Dimensional Methods for Inspection and Metrology IV
T2  - Proceedings of SPIE; V. 6382
SN  - 9780819464804 (Print)
PY  - 2006///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6382
ER  -