TY  - BOOK
AU  - Harding, Kevin, ed.
TI  - Two- and Three-Dimensional Methods for Inspection and Metrology III
T2  - Proceedings of SPIE; V. 6000
SN  - 9780819460240 (Print)
PY  - 2005///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6000
ER  -