@book{33363,
	author = {Harding, Kevin, ed.},
	title = {Two- and Three-Dimensional Methods for Inspection and Metrology III},
	publisher = {SPIE},
	year = {2005},
	series = {Proceedings of SPIE; V. 6000},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6000}
}