TY - BOOK AU - Harding, Kevin, ed. TI - Three-Dimensional Imaging, Optical Metrology, and Inspection IV T2 - Proceedings of SPIE; V. 3520 SN - 9780819429810 (Print) PY - 1998/// CY - Washington, USA PB - SPIE UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3520 ER -