00531nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245008000117260003200197300002000229490003300249856010300282IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819463517 (Print)  cIIA Library  aFan, Kuang-Chao, ed. 0aThird International Symposium on Precision Mechanical Measurementsh[eBook]  aWashington, USAbSPIEc2006  aOnline resource  aProceedings of SPIE; V. 6280  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6280yClick Here to Access eBook