Miyamoto, Isamu, ed. <br/><br/>
Third International Symposium on Laser Precision Microfabrication  [eBook] 

 - Washington, USA  SPIE  2003 
 - Online resource 
 - Proceedings of SPIE; V. 4830 .
<br/><br/><label>ISBN: </label>9780819446015 (Print)