@book{33230,
	author = {Miyamoto, Isamu, ed.},
	title = {Third International Symposium on Laser Precision Microfabrication},
	publisher = {SPIE},
	year = {2003},
	series = {Proceedings of SPIE; V. 4830},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4830}
}