TY  - BOOK
AU  - Zhou, Shixun, ed.
TI  - Third International Conference on Thin Film Physics and Applications
T2  - Proceedings of SPIE; V. 3175
SN  - 9780819426734 (Print)
PY  - 1998///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3175
ER  -