@book{33225,
	author = {Zhou, Shixun, ed.},
	title = {Third International Conference on Thin Film Physics and Applications},
	publisher = {SPIE},
	year = {1998},
	series = {Proceedings of SPIE; V. 3175},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3175}
}